Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Te-Chih Huang, Victor Emanuel Calado, Henricus Wilhelmus Maria Van Buel, Richard Johannes Franciscus Van Haren | 2018-12-25 |
| 10133188 | Metrology method, target and substrate | Arie Jeffrey Den Boef, Martin Ebert | 2018-11-20 |
| 10042268 | Method, apparatus and substrates for lithographic metrology | Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef, Omer Abubaker Omer Adam | 2018-08-07 |
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Patricius Aloysius Jacobus Tinnemans | 2018-04-10 |