Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Patricius Aloysius Jacobus Tinnemans | 2018-04-10 |