Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Hugo Augustinus Joseph Cramer, Robert John Socha, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-11-20 |
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Simon Gijsbert Josephus Mathijssen, Sander Bas Roobol, Nan Lin | 2018-11-20 |
| 9939742 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-04-10 |
| 9940703 | Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Martin Jacobus Johan Jak | 2018-04-10 |
| 9927726 | Polarization independent interferometer | Arie Jeffrey Den Boef, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Justin Kreuzer | 2018-01-02 |