Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156797 | Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method | Seyed Iman Mossavat, Maurits Van Der Schaar | 2018-12-18 |
| 10151985 | Process flagging and cluster detection without requiring reconstruction | Remco Dirks, Seyed Iman Mossavat | 2018-12-11 |
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Robert John Socha, Patricius Aloysius Jacobus Tinnemans, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-11-20 |
| 9977340 | Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus | Maria Johanna Hendrika Aben, Noelle Martina Wright, Ruben Alvarez Sanchez, Martijn Jaap Daniel Slob | 2018-05-22 |
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Peter Clement Paul Vanoppen, Eric Brouwer, Jan Hendrik Den Besten, Adrianus Franciscus Petrus Engelen, Paul Christiaan Hinnen | 2018-05-08 |
| 9952517 | Method of determining dose, inspection apparatus, patterning device, substrate and device manufacturing method | Alok Verma | 2018-04-24 |