Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Peter Clement Paul Vanoppen, Eric Brouwer, Hugo Augustinus Joseph Cramer, Jan Hendrik Den Besten, Paul Christiaan Hinnen | 2018-05-08 |