Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133191 | Method for determining a process window for a lithographic process, associated apparatuses and a computer program | Wim Tjibbo Tel, Frank Staals, Reiner Maria Jungblut | 2018-11-20 |
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Anton Bernhard Van Oosten, Robertus Cornelis Martinus De Kruif, Robert John Socha | 2018-08-21 |
| 10001710 | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method | Frank Staals, Carlo Cornelis Maria Luijten, Anton Bernhard Van Oosten | 2018-06-19 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya +1 more | 2018-06-19 |
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Peter Clement Paul Vanoppen, Eric Brouwer, Hugo Augustinus Joseph Cramer, Jan Hendrik Den Besten, Adrianus Franciscus Petrus Engelen | 2018-05-08 |
| 9939735 | Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method | Shu-jin Wang, Christian Marinus Leewis, Kuo-Feng PAO | 2018-04-10 |