Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Hugo Augustinus Joseph Cramer, Patricius Aloysius Jacobus Tinnemans, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-11-20 |
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Anton Bernhard Van Oosten, Paul Christiaan Hinnen, Robertus Cornelis Martinus De Kruif | 2018-08-21 |