Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Hugo Augustinus Joseph Cramer, Robert John Socha, Patricius Aloysius Jacobus Tinnemans | 2018-11-20 |
| 9958789 | Method of metrology, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Frank Staals, Hans Van Der Laan | 2018-05-01 |