Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958789 | Method of metrology, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Frank Staals, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-05-01 |