Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133191 | Method for determining a process window for a lithographic process, associated apparatuses and a computer program | Wim Tjibbo Tel, Paul Christiaan Hinnen, Reiner Maria Jungblut | 2018-11-20 |
| 10078273 | Lithographic apparatus with data processing apparatus | Emil Peter Schmitt-Weaver, Wolfgang Henke, Christopher PRENTICE, Wim Tjibbo Tel | 2018-09-18 |
| 10001710 | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method | Carlo Cornelis Maria Luijten, Paul Christiaan Hinnen, Anton Bernhard Van Oosten | 2018-06-19 |
| 9977344 | Metrology target, method and apparatus, computer program and lithographic system | Wim Tjibbo Tel | 2018-05-22 |
| 9958789 | Method of metrology, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Jean-Pierre Agnes Henricus Marie Vaessen, Hans Van Der Laan | 2018-05-01 |