Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Paul Christiaan Hinnen, Robertus Cornelis Martinus De Kruif, Robert John Socha | 2018-08-21 |
| 10001710 | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method | Frank Staals, Carlo Cornelis Maria Luijten, Paul Christiaan Hinnen | 2018-06-19 |