Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Anton Bernhard Van Oosten, Paul Christiaan Hinnen, Robert John Socha | 2018-08-21 |