Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133191 | Method for determining a process window for a lithographic process, associated apparatuses and a computer program | Frank Staals, Paul Christiaan Hinnen, Reiner Maria Jungblut | 2018-11-20 |
| 10078273 | Lithographic apparatus with data processing apparatus | Emil Peter Schmitt-Weaver, Wolfgang Henke, Christopher PRENTICE, Frank Staals | 2018-09-18 |
| 10025193 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Xing Lan Liu, Daan Maurits Slotboom, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2018-07-17 |
| 9977344 | Metrology target, method and apparatus, computer program and lithographic system | Frank Staals | 2018-05-22 |