Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133191 | Method for determining a process window for a lithographic process, associated apparatuses and a computer program | Wim Tjibbo Tel, Frank Staals, Paul Christiaan Hinnen | 2018-11-20 |