Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078273 | Lithographic apparatus with data processing apparatus | Wolfgang Henke, Christopher PRENTICE, Frank Staals, Wim Tjibbo Tel | 2018-09-18 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann, Daan Maurits Slotboom +2 more | 2018-05-15 |