Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078268 | Determination of stack difference and correction using stack difference | Arie Jeffrey Den Boef | 2018-09-18 |
| 10025199 | Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method | Arie Jeffrey Den Boef | 2018-07-17 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Paul Christiaan Hinnen +1 more | 2018-06-19 |