Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156797 | Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method | Seyed Iman Mossavat, Hugo Augustinus Joseph Cramer | 2018-12-18 |
| 10126662 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Markus Gerardus Martinus Maria Van Kraaij | 2018-11-13 |
| 10073357 | Measuring a process parameter for a manufacturing process involving lithography | Arie Jeffrey Den Boef, Omer Abubaker Omer Adam, Te-Chih Huang, Youping Zhang | 2018-09-11 |
| 10061212 | Metrology target, method and apparatus, target design method, computer program and lithographic system | Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Youping Zhang | 2018-08-28 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Markus Gerardus Martinus Maria Van Kraaij | 2018-03-06 |