Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126662 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-11-13 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-03-06 |