Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146140 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Maxim PISARENCO, Richard Quintanilha | 2018-12-04 |
| 10126662 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar | 2018-11-13 |
| 9958791 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stefan Hunsche | 2018-05-01 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Scott Anderson Middlebrooks, Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar | 2018-03-06 |