Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146140 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Maxim PISARENCO, Markus Gerardus Martinus Maria Van Kraaij | 2018-12-04 |
| 10101671 | Metrology methods, metrology apparatus and device manufacturing method | Arie Jeffrey Den Boef | 2018-10-16 |
| 10067074 | Metrology methods, metrology apparatus and device manufacturing method | Serhiy Danylyuk | 2018-09-04 |
| 10036962 | Inspection apparatus and methods, lithographic system and device manufacturing method | — | 2018-07-31 |
| 9915879 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Willem Marie Julia Marcel Coene | 2018-03-13 |
| 9904181 | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method | — | 2018-02-27 |