Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9946167 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Patrick Warnaar, Michael Kubis | 2018-04-17 |
| 9915879 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Richard Quintanilha | 2018-03-13 |