Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9946167 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Willem Marie Julia Marcel Coene, Patrick Warnaar, Michael Kubis | 2018-04-17 |