Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146140 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Richard Quintanilha, Markus Gerardus Martinus Maria Van Kraaij | 2018-12-04 |
| 9939250 | Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof | Irwan Dani Setija | 2018-04-10 |