Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Sander Bas Roobol, Nan Lin | 2018-11-20 |
| 10101675 | Metrology apparatus, method of measuring a structure and lithographic apparatus | Alessandro Polo | 2018-10-16 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Nan Lin, Sander Bas Roobol | 2018-09-04 |
| 10048596 | Method and apparatus for generating illuminating radiation | Nan Lin, Sander Bas Roobol | 2018-08-14 |
| 9970747 | Position measurement with illumination profile having two diametrically opposed off-axis radiation | Justin Kreuzer, Arie Jeffrey Den Boef | 2018-05-15 |
| 9958791 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2018-05-01 |
| 9939742 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2018-04-10 |
| 9927726 | Polarization independent interferometer | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Justin Kreuzer | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Arie Jeffrey Den Boef, Justin Kreuzer, Patricius Aloysius Jacobus Tinnemans | 2018-01-02 |