Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Simon Gijsbert Josephus Mathijssen, Nan Lin | 2018-11-20 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Nan Lin | 2018-09-04 |
| 10048596 | Method and apparatus for generating illuminating radiation | Nan Lin, Simon Gijsbert Josephus Mathijssen | 2018-08-14 |