Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9990451 | Process window optimizer | Venu Vellanki | 2018-06-05 |
| 9958791 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Markus Gerardus Martinus Maria Van Kraaij | 2018-05-01 |