Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970747 | Position measurement with illumination profile having two diametrically opposed off-axis radiation | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-05-15 |
| 9927726 | Polarization independent interferometer | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans | 2018-01-02 |