Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073357 | Measuring a process parameter for a manufacturing process involving lithography | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Te-Chih Huang, Youping Zhang | 2018-09-11 |
| 10042268 | Method, apparatus and substrates for lithographic metrology | Hendrik Jan Hidde Smilde, Arie Jeffrey Den Boef, Martin Jacobus Johan Jak | 2018-08-07 |