Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Hendrik Jan Hidde Smilde, Victor Emanuel Calado, Henricus Wilhelmus Maria Van Buel, Richard Johannes Franciscus Van Haren | 2018-12-25 |
| 10073357 | Measuring a process parameter for a manufacturing process involving lithography | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Omer Abubaker Omer Adam, Youping Zhang | 2018-09-11 |
| 9903823 | Metrology method and apparatus | Yen-Wen Lu, Jay Jianhui Chen, Wei-Cheng Liu, Boris Menchtchikov, Jen-Shiang Wang | 2018-02-27 |