Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162272 | Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Hendrik Jan Hidde Smilde, Te-Chih Huang, Henricus Wilhelmus Maria Van Buel, Richard Johannes Franciscus Van Haren | 2018-12-25 |