Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10007744 | Process based metrology target design | Guangqing Chen, Shufeng Bai, Eric Kent, Yen-Wen Lu, Paul Anthony Tuffy +3 more | 2018-06-26 |
| 9903823 | Metrology method and apparatus | Yen-Wen Lu, Jay Jianhui Chen, Wei-Cheng Liu, Boris Menchtchikov, Te-Chih Huang | 2018-02-27 |