Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061212 | Metrology target, method and apparatus, target design method, computer program and lithographic system | Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Youping Zhang | 2018-08-28 |
| 9971478 | Method and apparatus for inspection and metrology | Erik Mathijs Maria Crombag, Ajith Ganesan | 2018-05-15 |