Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Emil Peter Schmitt-Weaver, Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann +2 more | 2018-05-15 |
| 9946165 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2018-04-17 |