Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9879988 | Metrology method and apparatus, computer program and lithographic system | Xing Lan Liu, Hendrik Jan Hidde Smilde, Hakki Ergün Cekli, Josselin Pello, Richard Johannes Franciscus Van Haren | 2018-01-30 |
| 9869940 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Jen-Yu Fang, Arie Jeffrey Den Boef, Alexander Straaijer, Ching-Yi Hung +1 more | 2018-01-16 |