Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869940 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Yue-Lin Peng, Arie Jeffrey Den Boef, Alexander Straaijer, Ching-Yi Hung +1 more | 2018-01-16 |