| 9478408 |
Systems and methods for removing particles from a substrate processing chamber using RF plasma cycling and purging |
Hu Kang |
2016-10-25 |
| 9460915 |
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges |
Sesha Varadarajan, Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall +2 more |
2016-10-04 |
| 9425078 |
Inhibitor plasma mediated atomic layer deposition for seamless feature fill |
Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Deenesh Padhi +1 more |
2016-08-23 |
| 9390909 |
Soft landing nanolaminates for advanced patterning |
Frank L. Pasquale, Shankar Swaminathan, Nader Shamma, Girish Dixit |
2016-07-12 |
| 9373500 |
Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications |
Shankar Swaminathan, Frank L. Pasquale |
2016-06-21 |
| 9355839 |
Sub-saturated atomic layer deposition and conformal film deposition |
Shankar Swaminathan, Hu Kang |
2016-05-31 |
| 9355886 |
Conformal film deposition for gapfill |
Shankar Swaminathan, Bart J. van Schravendijk, Sesha Varadarajan, Jason D. Park, Michal Danek +1 more |
2016-05-31 |
| 9343296 |
Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants |
— |
2016-05-17 |
| 9287113 |
Methods for depositing films on sensitive substrates |
Hu Kang, Shankar Swaminathan, Jon Henri |
2016-03-15 |
| 9263350 |
Multi-station plasma reactor with RF balancing |
Sunil Kapoor, Karl Leeser, Yaswanth Rangineni |
2016-02-16 |
| 9257274 |
Gapfill of variable aspect ratio features with a composite PEALD and PECVD method |
Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann +1 more |
2016-02-09 |
| 9236244 |
Sequential precursor dosing in an ALD multi-station/batch reactor |
Ramesh Chandrasekharan, Damien Slevin, Karl Leeser |
2016-01-12 |
| 9230800 |
Plasma activated conformal film deposition |
Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh, Dennis M. Hausmann +9 more |
2016-01-05 |
