Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Wei Tang, Bart J. van Schravendijk, Kaihan Ashtiani | 2016-08-02 |
| 9355886 | Conformal film deposition for gapfill | Shankar Swaminathan, Bart J. van Schravendijk, Adrien LaVoie, Sesha Varadarajan, Michal Danek +1 more | 2016-05-31 |