Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Bart van Schravendijk +3 more | 2016-09-20 |
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Wei Tang, Jason D. Park, Bart J. van Schravendijk | 2016-08-02 |
| 9299559 | Flowable oxide film with tunable wet etch rate | Nerissa Draeger, Karena Shannon, Bart van Schravendijk | 2016-03-29 |
| 9284644 | Apparatus and method for improving wafer uniformity | Kevin Madrigal, Frances Katherine Zelaya, Hsiang-Yun Lee | 2016-03-15 |