Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484202 | Apparatus and methods for spacer deposition and selective removal in an advanced patterning process | Jie Zhou, Chentsau Ying, Srinivas D. Nemani, Jingjing Liu, Ellie Yieh | 2016-11-01 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |
| 9382625 | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition | Jun Xue, Jingjing Liu, Yongmei Chen, Ludovic Godet, Chentsau Ying | 2016-07-05 |
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Vincent E. Burkhart, Scott Fields | 2016-05-10 |