Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484251 | Contact integration for reduced interface and series contact resistance | Paul R. Besser, William Crew | 2016-11-01 |
| 9478411 | Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS | Shruti Vivek Thombare, Ishtak Karim, Reza Arghavani, Michal Danek | 2016-10-25 |
| 9478438 | Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor | Shruti Vivek Thombare, Ishtak Karim, Michal Danek | 2016-10-25 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Natan Solomon, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |
| 9349637 | Method for void-free cobalt gap fill | Jeong-Seok Na, Tianhua Yu, Michal Danek | 2016-05-24 |
| 9255326 | Systems and methods for remote plasma atomic layer deposition | Jeong-Seok Na | 2016-02-09 |