Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani +3 more | 2016-09-20 |
| 9299559 | Flowable oxide film with tunable wet etch rate | Nerissa Draeger, Karena Shannon, Kaihan Ashtiani | 2016-03-29 |
| 9257302 | CVD flowable gap fill | Feng Wang, Victor Lu, Brian Lu, Wai-Fan Yau, Nerissa Draeger +4 more | 2016-02-09 |