Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299559 | Flowable oxide film with tunable wet etch rate | Karena Shannon, Bart van Schravendijk, Kaihan Ashtiani | 2016-03-29 |
| 9257302 | CVD flowable gap fill | Feng Wang, Victor Lu, Brian Lu, Wai-Fan Yau, Vishal Gauri +4 more | 2016-02-09 |
| 9245739 | Low-K oxide deposition by hydrolysis and condensation | Nicholas Muga Ndiege, Krishna Nittala, Derek Wong, George Andrew Antonelli, Patrick A. Van Cleemput | 2016-01-26 |