Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Shambhu N. Roy, Scott Fields | 2016-05-10 |