Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Shambhu N. Roy, Vincent E. Burkhart | 2016-05-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Shambhu N. Roy, Vincent E. Burkhart | 2016-05-10 |