SF

Scott Fields

NS Novellus Systems: 1 patents #36 of 114Top 35%
Overall (2016): #236,866 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9337067 High temperature electrostatic chuck with radial thermal chokes Shambhu N. Roy, Vincent E. Burkhart 2016-05-10