Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Sanjay Gopinath, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |