Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349637 | Method for void-free cobalt gap fill | Tianhua Yu, Michal Danek, Sanjay Gopinath | 2016-05-24 |
| 9255326 | Systems and methods for remote plasma atomic layer deposition | Sanjay Gopinath | 2016-02-09 |