Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478411 | Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS | Shruti Vivek Thombare, Ishtak Karim, Sanjay Gopinath, Michal Danek | 2016-10-25 |
| 9418987 | Transistor with threshold voltage set notch and method of fabrication thereof | Pushkar Ranade, Lucian Shifren, Scott E. Thompson, Catherine de Villeneuve | 2016-08-16 |
| 9396961 | Integrated etch/clean for dielectric etch applications | Shashank Deshmukh, Eric A. Hudson, Tom A. Kamp, Samantha Tan, Gerardo Delgadino | 2016-07-19 |