Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396961 | Integrated etch/clean for dielectric etch applications | Reza Arghavani, Shashank Deshmukh, Eric A. Hudson, Tom A. Kamp, Gerardo Delgadino | 2016-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396961 | Integrated etch/clean for dielectric etch applications | Reza Arghavani, Shashank Deshmukh, Eric A. Hudson, Tom A. Kamp, Gerardo Delgadino | 2016-07-19 |