Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484214 | Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma | Arthur H. Sato, Alex Paterson | 2016-11-01 |
| 9396961 | Integrated etch/clean for dielectric etch applications | Reza Arghavani, Shashank Deshmukh, Eric A. Hudson, Samantha Tan, Gerardo Delgadino | 2016-07-19 |