Issued Patents 2016
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530656 | Temperature control in RF chamber with heater and air amplifier | Jon McChesney | 2016-12-27 |
| 9515633 | Transformer coupled capacitive tuning circuit with fast impedance switching for plasma etch chambers | Maolin Long | 2016-12-06 |
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | John Drewery, Maolin Long | 2016-11-08 |
| 9484214 | Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma | Tom A. Kamp, Arthur H. Sato | 2016-11-01 |
| 9460894 | Controlling ion energy within a plasma chamber | Thorsten Lill, Harmeet Singh, Gowri Kamarthy | 2016-10-04 |
| 9384948 | Hammerhead TCP coil support for high RF power conductor etch systems | Maolin Long | 2016-07-05 |
| 9336996 | Plasma processing systems including side coils and methods related to the plasma processing systems | Maolin Long | 2016-05-10 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Ricky Marsh, Ying Wu, John Drewery | 2016-03-22 |
| 9257295 | Ion beam etching system | Harmeet Singh | 2016-02-09 |
| 9245761 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Vahid Vahedi, Monica Titus, Gowri Kamarthy | 2016-01-26 |
| 9245717 | Gas distribution system for ceramic showerhead of plasma etch reactor | Michael Kang | 2016-01-26 |
| 9230819 | Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing | Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu, Monica Titus +5 more | 2016-01-05 |